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Multi-Scale System Design

Lecture Notes

Class sessions 1 through 18 are lectures. Notes for most of these sessions are provided in the following table.

SES #

TOPICS

SESSION CATEGORIES

INSTRUCTORS

LECTURE NOTES

1

Introduction to MuSS and SPM Case Study

Course Goals, Logistics and Expectations

Comparison of MuSS and MoSS Fundamentals

MuSS Example: Overview of SPM Technology

Fundamental Principles

Prof. Martin L. Culpepper

(PDF)

2

MuSS Design Fundamentals and Methods

MuSS Design Fundamentals and Methods

Design Principles and Systems Design

MuSS Manufacturing Issues

Fundamental Principles

Prof. Sang-Gook Kim

(PDF - 1.5 MB)

3

Macro/Meso-scales Components and Characteristics

Principles, Metrics and Types of Cross-scale Incompatibilities

Incompatibilities of Macro/Meso Parts with Micro/Nano Parts

Integrating Constraints on Macro/Meso-scale Parts

Fundamental Principles

Prof. Martin L. Culpepper

(PDF - 2.6 MB)

4

Micro-scale Components and Characteristics

Principles of Macro/Meso-scale and Micro-scale Part Integration

Incompatibilities of Micro Parts with Nano Parts

Micro-scale Part Errors and Implications for Integration

Fundamental Principles

Prof. Martin L. Culpepper

(PDF - 1.3 MB)

5

Nano-scale Components and Characteristics

Principles of nm-scale Physics which Govern Integration Incompatibility

Nano-scale Actuators, Structures and Sensors

Trasmissability of Nano-scale Errors to other Scales

Fundamental Principles

Prof. Martin L. Culpepper

(PDF - 1.7 MB)

6

Scanning Probe Microscopy Project Introduction

Project Goals and Expectations

Demonstration of 2.76 SPM

Questions, Team Selection and Planning

Case Study/Application

Soohyung Kim, Course TA

(PDF)

7

Piezo MEMS: Materials

Piezoelectricity

Materials

Processing

Fundamental Principles

Prof. Sang-Gook Kim

(PDF 1 of 2 - 3.0 MB)

(PDF 2 of 2 - 2.4 MB)

8

Piezoelectric MEMS: Applications

Piezoelectric Transducers

Micro-actuators

Sensors and Generators

Case Study/Application

Prof. Sang-Gook Kim

(PDF - 1.7 MB)

9

Optical MEMS

Functionality

Devices

Materials

Fundamental Principles

Prof. Sang-Gook Kim

(PDF)

10

Nominal and Statistical Error Budgets

Principles of Determinism, Accuracy, Repeatability

Kinematic Error Modeling of Rigid-flexible Systems

Nominal and Probabilitic System Error Modeling

Design and Manufacturing

Prof. Martin L. Culpepper

(PDF)

11

Presentations on Paper Critiques

Students

12

Mechanical Interfaces for Cross-scale Alignment

Principles of Mechanical Constraint

Design of Rigid, Flexible and Rigid-flexible Constraint

Manufacturing and Assembly of Cross-scale Interfaces

Design and Manufacturing

Prof. Martin L. Culpepper

(PDF - 2.5 MB)

13

Mechanisms for Inter-scale Motion

Principles of Mass, Momentum and Energy Incompatibility

Momentum Incompatibilities

Energy Incompatibilities

Design and Manufacturing

Prof. Martin L. Culpepper

(PDF)

14

Carbon Nanotubes

Synthesis

Properties and Applications

Issues of Manufacturing

Design and Manufacturing

Prof. Sang-Gook Kim

(PDF - 2.9 MB)

15

Complexity of MuSS

Uncertainty and Difficulty

Complexity

Functional Periodicity

Design and Manufacturing

Prof. Sang-Gook Kim

(PDF - 1.1 MB)

16

Metrology

System Requirements

Components and Selection Process

Metrology-Machine Integration

Design and Manufacturing

Guest Lecturer

17

Telescopes and the Oil Industry

X-Ray Telescopes

Oil-well MEMS Sensors

Questions and Discussion

Case Study/Application

Guest Lecturer

18

Data Acquisition, Sensors and Control

Programming in Simulink®

Introduction to dSPACE Control System

Demonstration of Acquisition and Control System

Design and Manufacturing

Guest Lecturer

Problem Sets

Each problem set of the term project is a 1- 2 page of design summary of your important decisions/modeling/progress to date. We would expect to see detailed sketches, major equations and plots which demonstrate that you are on the right track.  A short discussion of risks/mitigation plans and your group's schedule (constrained by the syllabus of course) would be important as well.

Problem Set 1: Macro to Micro Flexure Design Exercise (PDF)

Problem Set 2: MEMS Intuition Exercise (PDF)

Problem Set 3: Tunneling Current Sensitivity Exercise (PDF)

Problem Set 4: Homogeneous Transformation Matrix Exercise (PDF)

Problem Set 5: HTM-Kinematic Coupling Exercise (PDF)

Problem Set 6: Kinematic Coupling Stiffness Exercise (PDF)

Projects

Supporting Materials

  1. 1.a) Pre-amp electronics theory and spec sheets (PDF)
    b) TI OPA627/637 spec sheet (PDF)
  2. 2.Capacitance probe theory primer
  3. 3.Capacitance probe spec sheets
    Manufacturer: Lion precision
    Model number: C1-C
  4. 4.dSpace data acquisition and control system
    Manufacturer:dSpace
    Model Number: DS1104 R&D Controller Board
  5. 5.Piezo actuator primer
  6. 6.Z Axis Piezo actuator specs
    Manufacturer: PI (Physik Instrumente)
    Model number: P-882.11
  7. 7.X and Y Axis Piezo actuator specs
    Manufacturer:Piezojena
    Model number: PA 50/14 SG
  8. 8.How to make DXF files (Waterjet accepts DXF files made from CAD program) (PDF)
  9. 9.Dynamic characteristics of environment (large table) (PDF)
  10. 10.Thermal characteristics of environment (small table) (JPG)
  11. 11.Shielded cables (where to buy and how to make)
    Manufacturer:Alpha Wire
    Type: Coaxial cables - seecatalogp. 287
  12. 12.Information on tips to be used
    Supplier: Veeco Probes
    Material: Pt-Ir (Platinum-Iridium), Mechanically cut
    Dimensions: diameter (0.25mm), length (8mm)
  13. 13.Information on samples to be used
    Supplier: Veeco Probes
    Material:HOPG (Highly Ordered Pyrolytic Graphite)
  14. 14.Optical Tables. SeeTechnical Manufacturing CompanyWeb site