Semiconductor Manufacturing
Lecture Notes
|
LEC # |
TOPICS |
|
|
1 |
Overview of Semiconductor Manufacturing (PDF) |
|
|
Statistical Process Control |
||
|
2 |
Statistics Review: Distributions (PDF) |
|
|
3 |
Statistics Review: Estimation (PDF) |
|
|
4 |
Hypothesis Tests and Control Chart Introduction (PDF) |
|
|
5 |
Control Charts |
|
|
6 |
Advanced Control Charts, Nested Variance (PDF) |
|
|
Experimental Design |
||
|
7 |
Analysis and Design of Experiments (PDF) |
|
|
8 |
ANOVA, Variance Component Estimation |
|
|
9 |
MANOVA, Factorial Experiments (PDF) |
|
|
Yield and Yield Learning |
||
|
10 |
Design of Experiments and Response Surface Modeling (PDF) |
|
|
11 |
||
|
12 |
Yield Management and Modeling |
|
|
13 |
Yield Modeling |
|
|
Advanced Process Control |
||
|
14 |
Spatial Modeling |
|
|
15 |
Sensors and Signals (PDF) |
|
|
16 |
PCA and Time Series |
|
|
17 |
Run by Run Control (PDF) |
|
|
18 |
Real Time Control, Scheduling |
|
|
Factory Operation and Design |
||
|
19 |
Scheduling (PDF) |
|
|
20 |
Planning (PDF) |
|
|
21 |
Factory Design and Efficiency (PDF) |
|
Assignments
Problem Set 1 (PDF)
Problem Set 2 (PDF)
Problem Set 3 (PDF)
Problem Set 4 (PDF)
Problem Set 5 (PDF)
Problem Set 6 (PDF)
Problem Set 7 (PDF)
Critical Paper Review (PDF)