• Print

Micro/Nano Processing Technology

Lecture Notes

The instructor for each lecture is provided below according to the following key:

MAS = Martin Schmidt
RCOH = Robert O' Handley
SR = Susan Ruff

A note on CI-M: CI-M refers to the "Communication Intensive in the Major" requirement for juniors and seniors. CIM courses practice forms of communication that are specific to the professional and academic culture of the discipline.

LEC #

TOPICS

LECTURERS

1

Overview/Safety/Lab Assignment (PDF)

CI-M: Introduction to CI-M

MAS

SR

2

IC Lab - Overview (PDF)

MAS

3

Oxidation

MAS

4

Diffusion (PDF - 4.5 MB)

RCOH

5

IC Lab: Testing (PDF)

CI-M: Writing Technical Reports (PDF)

MAS

SR

6

Diffusion/Implantation (PDF)

RCOH

7

MEMS Lab: Overview (PDF)

MAS

8

Vacuum System (PDF)

RCOH

9

CVD (PDF)

RCOH

10

Sputtering (PDF)

CI-M: Feedback on IC Report, Reports Returned (PDF)

RCOH

SR
 

11

Fluids Lab: Overview

MAS

12

Evaporation (PDF - 2.6 MB)

RCOH

13

MEMS Lab: Testing (PDF - 1.6 MB)

MAS

14

Lithography

MAS

15

Lithography, Soft Lithography

MAS

16

Etching (Wet) (PDF - 3.5 MB)

RCOH

17

Etching (Dry) (PDF)

RCOH

18

CMOS

MAS

19

Advanced Silicon Devices

MAS

20

Fluids Lab: Testing (PDF)

MAS

21

Take Home Introduction / Patents (PDF)

MAS

22

Take Home Discussion (PDF)

MAS

23

Advanced Topics (Guest)

 

24

Advanced Topics (cont.) (Guest)

 

25

Analog Devices Fab Tour

 

 

Labs

  • IC Lab Report (PDF)
  • MEMS Lab Report (PDF)
  • Fluids Lab Report (PDF)

 

Assignments

This section lists the assignments, including solutions, that were given during the course.

ASSIGNMENTS

SOLUTIONS

Problem Set 1 (PDF)

(PDF)

Problem Set 2 (PDF)

(PDF)

Problem Set 3 (PDF)

(PDF)

Problem Set 4 (PDF)

(PDF)

Problem Set 5 (PDF)

(PDF)

Problem Set 6 (PDF)

(PDF)

Problem Set 7 (PDF)

(PDF)

Problem Set 8 (PDF)

(PDF)

Exams

This section provides solutions and study materials for the exams given in this course.

  • Quiz 1 Solution (PDF)
  • Supporting Materials for Quiz 1 - Equations and Figures (PDF)
  • Fall 2004 Quiz 2 Solutions (PDF)
  • Spring 2005 Quiz 2 (PDF)
  • Spring 2005 Problem Set 7 (PDF)
  • Take Home Exam (PDF)